Електростатичний memc-перетворювач як основа реалізації мікроелектронного акселерометра
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Файли
Дата
2018
Автори
Таранчук, А.А.
Слободян, В.О.
Осадчук, О.В.
Taranchuk, A.A.
Slobodian, V.О.
Оsadchuk, A.V.
Назва журналу
Номер ISSN
Назва тому
Видавець
Хмельницький національний університет
Анотація
У роботі показана можливість реалізації акселерометра на основі електростатичного МЕMC-
перетворювача, що основана на чутливості його характеристик до зовнішнього збурення. Проведений аналіз
поведінки рухомого електрода акселерометра на основі електростатичного МЕМС-перетворювача під дією
зовнішньої періодичної сили. Встановлений взаємозв’язок основних характеристик акселерометра і його
конструктивних параметрів. Сформульовані рекомендації щодо раціонального вибору конструктивних
параметрів акселерометрів на етапі їх проектування.
The use of new principles and constructive solutions for the construction of transducers of physical quantities is an important trend in modern instrument making. Such transducers of one form of energy into another include devices that form single microstructures of mechanical and electrical elements and components, the so-called micro electromechanical systems (MEMS). At present, the development, production and introduction of inertial sensors, which include accelerometers, have received high rates. Electrostatic MEMS-transducers provide basic possibilities for the implementation on their basis of single-component and multi-component accelerometers with an appropriate number of degrees of freedom and kinematics. The work confirms the high efficiency of the use of electrostatic MEMS - transducers as microelectronic accelerometers, whose work is based on converted electric energy into the electrostatic power interaction of a stationary electrode with a movable (inertial) electrode of a given mass. The paper is devoted to the urgent questions regarding the rational choice of structural parameters of microelectronic accelerometers, realized on the basis of electrostatic MEMS - transducers with controlled voltage capacitors. The work of an accelerometer based on an electrostatic MEMC- transducer is based on the sensitivity of its characteristics to external disturbances. The sensitive element of the accelerometer is an inertial mass in the form of a moving electrode made of polysilicon, the processing technology of which is well studied. The motion of the mass of the inertial electrode is recorded by changing the capacitance between two parallel plates - electrodes MEMS. An analysis of the behavior of a movable electrode accelerometer based on an electrostatic MEMS - transducer under the action of external periodic force was carried out. The correlation of the main characteristics of the accelerometer and its constructive parameters is established. The recommendations for rational choice of constructive parameters of accelerometers at the stage of their design are formulated.
The use of new principles and constructive solutions for the construction of transducers of physical quantities is an important trend in modern instrument making. Such transducers of one form of energy into another include devices that form single microstructures of mechanical and electrical elements and components, the so-called micro electromechanical systems (MEMS). At present, the development, production and introduction of inertial sensors, which include accelerometers, have received high rates. Electrostatic MEMS-transducers provide basic possibilities for the implementation on their basis of single-component and multi-component accelerometers with an appropriate number of degrees of freedom and kinematics. The work confirms the high efficiency of the use of electrostatic MEMS - transducers as microelectronic accelerometers, whose work is based on converted electric energy into the electrostatic power interaction of a stationary electrode with a movable (inertial) electrode of a given mass. The paper is devoted to the urgent questions regarding the rational choice of structural parameters of microelectronic accelerometers, realized on the basis of electrostatic MEMS - transducers with controlled voltage capacitors. The work of an accelerometer based on an electrostatic MEMC- transducer is based on the sensitivity of its characteristics to external disturbances. The sensitive element of the accelerometer is an inertial mass in the form of a moving electrode made of polysilicon, the processing technology of which is well studied. The motion of the mass of the inertial electrode is recorded by changing the capacitance between two parallel plates - electrodes MEMS. An analysis of the behavior of a movable electrode accelerometer based on an electrostatic MEMS - transducer under the action of external periodic force was carried out. The correlation of the main characteristics of the accelerometer and its constructive parameters is established. The recommendations for rational choice of constructive parameters of accelerometers at the stage of their design are formulated.
Опис
Ключові слова
мікроелектромеханічна система, електростатичний перетворювач, акселерометр, зовнішнє збурення, рухомий електрод, змінна ємність, вимірювання прискорення, micro electromechanical system, electrostatic transducer, accelerometer, external disturbance, a movable electrode, a variable capacitance, measuring the acceleration
Бібліографічний опис
Таранчук, А.А. Електростатичний memc-перетворювач як основа реалізації мікроелектронного акселерометра [Текст] / А. А. Таранчук, В. О. Слободян, О. В. Осадчук // Вісник Хмельницького національного університету. Технічні науки. – 2018. – № 6, т. 2. – С. 171-177.